Fourier transform infrared spectrometer based on an electrothermal MEMS mirror
نویسندگان
چکیده
منابع مشابه
A Fourier Transform Spectrometer Based on an Electrothermal MEMS Mirror with Improved Linear Scan Range
A Fourier transform spectrometer (FTS) that incorporates a closed-loop controlled, electrothermally actuated microelectromechanical systems (MEMS) micromirror is proposed and experimentally verified. The scan range and the tilting angle of the mirror plate are the two critical parameters for MEMS-based FTS. In this work, the MEMS mirror with a footprint of 4.3 mm × 3.1 mm is based on a modified...
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ژورنال
عنوان ژورنال: Applied Optics
سال: 2018
ISSN: 1559-128X,2155-3165
DOI: 10.1364/ao.57.005956